Effects of interface roughness on the spectral properties of thin films and multilayers

Appl Opt. 2003 Sep 1;42(25):5140-8. doi: 10.1364/ao.42.005140.

Abstract

We introduce two parameters, large-scale and small-scale rms roughness, to take into account the interface properties of thin films and multilayers in the calculation of their specular reflectance and transmittance. A theoretical motivation for the introduction of these two parameters instead of a standard single rms roughness is provided. Experimental power spectral density functions of several samples are used to illustrate ways in which the parameters introduced can be evaluated.