A novel, single-mode piezoceramic plate actuator for ultrasonic linear motors

IEEE Trans Ultrason Ferroelectr Freq Control. 2005 Nov;52(11):2047-53. doi: 10.1109/tuffc.2005.1561674.

Abstract

A new type of piezoelectric plate actuator for ultrasonic linear motors has been developed. These new piezoelectric actuators use the principle of asymmetric resonant excitation of the piezoceramic plate in a special resonant mode consisting of a standing two-dimensional extensional wave in a piezoceramic plate. The behavior of the actuator has been simulated with finite-element method (FEM) software and the simulation results checked with single-point contact measurements on the surface of the actuator. This paper describes this work and closes by describing the new ultrasonic translation stages based on this design.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Ceramics / chemistry*
  • Ceramics / radiation effects
  • Computer Simulation
  • Computer-Aided Design
  • Electrochemistry / instrumentation*
  • Electrochemistry / methods
  • Equipment Design
  • Equipment Failure Analysis
  • Models, Theoretical*
  • Motion
  • Reproducibility of Results
  • Sensitivity and Specificity
  • Transducers*
  • Ultrasonography / instrumentation*
  • Ultrasonography / methods