High resolution interferometer with multiple-pass optical configuration

Opt Express. 2009 Nov 9;17(23):21042-9. doi: 10.1364/OE.17.021042.

Abstract

An interferometer having fourteen times higher resolution than a conventional single-pass interferometer has been developed by making multiple-pass optical path. To embody the multiple-pass optical configuration, a two-dimensional corner cube array block was designed, and its symmetric structure minimized the measurement error. The effect from the alignment error and the imperfection of corner cube is calculated as picometer level. An experiment proves that the suggested interferometer has about 45 nm of optical resolution and its nonlinearity is about 0.5 nm in peak-to-valley.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Equipment Design
  • Interferometry / instrumentation*
  • Interferometry / methods
  • Lasers
  • Light
  • Optical Devices
  • Optics and Photonics*
  • Refractometry / instrumentation
  • Refractometry / methods
  • Reproducibility of Results
  • Software