Wafer-scale synthesis and transfer of graphene films

Nano Lett. 2010 Feb 10;10(2):490-3. doi: 10.1021/nl903272n.

Abstract

We developed means to produce wafer scale, high-quality graphene films as large as 3 in. wafer size on Ni and Cu films under ambient pressure and transfer them onto arbitrary substrates through instantaneous etching of metal layers. We also demonstrated the applications of the large-area graphene films for the batch fabrication of field-effect transistor (FET) arrays and stretchable strain gauges showing extraordinary performances. Transistors showed the hole and electron mobilities of the device of 1100 +/- 70 and 550 +/- 50 cm(2)/(V s) at drain bias of -0.75 V, respectively. The piezo-resistance gauge factor of strain sensor was approximately 6.1. These methods represent a significant step toward the realization of graphene devices in wafer scale as well as application in optoelectronics, flexible and stretchable electronics.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Catalysis
  • Copper / chemistry*
  • Dimethylpolysiloxanes / chemistry
  • Electronics
  • Equipment Design
  • Graphite / chemistry
  • Materials Testing
  • Nanostructures / chemistry
  • Nanotechnology / methods*
  • Nickel / chemistry*
  • Optics and Photonics
  • Polymers / chemistry
  • Pressure

Substances

  • Dimethylpolysiloxanes
  • Polymers
  • baysilon
  • Graphite
  • Copper
  • Nickel