CMOS-compatible athermal silicon microring resonators

Opt Express. 2010 Feb 15;18(4):3487-93. doi: 10.1364/OE.18.003487.

Abstract

We propose a new class of resonant silicon optical devices, consisting of a ring resonator coupled to a Mach-Zehnder interferometer, which is passively temperature compensated by tailoring the optical mode confinement in the waveguides. We demonstrate operation of the device over a wide temperature range of 80 degrees. The fundamental principle behind this work can be extended to other photonic devices based on resonators such as modulators, routers, switches and filters.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Electronics / instrumentation*
  • Equipment Design
  • Equipment Failure Analysis
  • Hot Temperature
  • Interferometry / instrumentation*
  • Optical Devices*
  • Refractometry / instrumentation*
  • Silicon / chemistry*
  • Transducers*

Substances

  • Silicon