A new single-photon avalanche diode in 90nm standard CMOS technology

Opt Express. 2010 Oct 11;18(21):22158-66. doi: 10.1364/OE.18.022158.

Abstract

We report on the first implementation of a single-photon avalanche diode (SPAD) in 90nm complementary metal oxide semiconductor (CMOS) technology. The detector features an octagonal multiplication region and a guard ring to prevent premature edge breakdown using a standard mask set exclusively. The proposed structure emerged from a systematic study aimed at miniaturization, while optimizing overall performance. The guard ring design is the result of an extensive modeling effort aimed at constraining the multiplication region within a well-defined area where the electric field exceeds the critical value for impact ionization. The device exhibits a dark count rate of 8.1 kHz, a maximum photon detection probability of 9% and the jitter of 398ps at a wavelength of 637nm, all of them measured at room temperature and 0.13V of excess bias voltage. An afterpulsing probability of 32% is achieved at the nominal dead time. Applications include time-of-flight 3D vision, fluorescence lifetime imaging microscopy, fluorescence correlation spectroscopy, and time-resolved gamma/X-ray imaging. Standard characterization of the SPAD was performed in different bias voltages and temperatures.

MeSH terms

  • Algorithms
  • Computer Simulation
  • Electromagnetic Fields
  • Imaging, Three-Dimensional / methods
  • Microscopy, Fluorescence / methods
  • Optics and Photonics*
  • Photons*
  • Reproducibility of Results
  • Semiconductors*
  • X-Rays