Strained germanium thin film membrane on silicon substrate for optoelectronics

Opt Express. 2011 Dec 19;19(27):25866-72. doi: 10.1364/OE.19.025866.

Abstract

This work presents a novel method to introduce a sustainable biaxial tensile strain larger than 1% in a thin Ge membrane using a stressor layer integrated on a Si substrate. Raman spectroscopy confirms 1.13% strain and photoluminescence shows a direct band gap reduction of 100meV with enhanced light emission efficiency. Simulation results predict that a combination of 1.1% strain and heavy n(+) doping reduces the required injected carrier density for population inversion by over a factor of 60. We also present the first highly strained Ge photodetector, showing an excellent responsivity well beyond 1.6um.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Electronics / instrumentation*
  • Equipment Design
  • Germanium / chemistry*
  • Germanium / radiation effects*
  • Light
  • Membranes, Artificial*
  • Optical Devices
  • Photometry / methods*
  • Semiconductors*
  • Silicon / chemistry*

Substances

  • Membranes, Artificial
  • Germanium
  • Silicon