Compact MEMS-driven pyramidal polygon reflector for circumferential scanned endoscopic imaging probe

Opt Express. 2012 Mar 12;20(6):6325-39. doi: 10.1364/OE.20.006325.

Abstract

A novel prototype of an electrothermal chevron-beam actuator based microelectromechanical systems (MEMS) platform has been successfully developed for circumferential scan. Microassembly technology is utilized to construct this platform, which consists of a MEMS chevron-beam type microactuator and a micro-reflector. The proposed electrothermal microactuators with a two-stage electrothermal cascaded chevron-beam driving mechanism provide displacement amplification, thus enabling a highly reflective micro-pyramidal polygon reflector to rotate a large angle for light beam scanning. This MEMS platform is ultra-compact, supports circumferential imaging capability and is suitable for endoscopic optical coherence tomography (EOCT) applications, for example, for intravascular cancer detection.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Endoscopes*
  • Equipment Design
  • Equipment Failure Analysis
  • Image Enhancement / instrumentation*
  • Lenses*
  • Micro-Electrical-Mechanical Systems / instrumentation*
  • Pilot Projects
  • Reproducibility of Results
  • Sensitivity and Specificity
  • Transducers*