Silicon nano-membrane based photonic crystal microcavities for high sensitivity bio-sensing

Opt Lett. 2012 Apr 1;37(7):1208-10. doi: 10.1364/OL.37.001208.

Abstract

We experimentally demonstrated photonic crystal microcavity based resonant sensors coupled to photonic crystal waveguides in silicon nano-membrane on insulator for chemical and bio-sensing. Linear L-type microcavities are considered. In contrast to cavities with small mode volumes, but low quality factors for bio-sensing, we showed increasing the length of the microcavity enhances the quality factor of the resonance by an order of magnitude and increases the resonance wavelength shift while retaining compact device characteristics. Q~26760 and sensitivity down to 15 ng/ml and ~110 pg/mm2 in bio-sensing was experimentally demonstrated on silicon-on-insulator devices.

Publication types

  • Research Support, N.I.H., Extramural
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Animals
  • Antibodies, Monoclonal / analysis
  • Biosensing Techniques / instrumentation*
  • Equipment Design
  • Goats
  • Humans
  • Nanostructures*
  • Optical Devices*
  • Optical Phenomena
  • Photons
  • Rabbits
  • Rats
  • Silicon / chemistry

Substances

  • Antibodies, Monoclonal
  • Silicon