Nanometer displacement measurement using Fresnel diffraction

Appl Opt. 2012 Jul 20;51(21):5066-72. doi: 10.1364/AO.51.005066.

Abstract

We introduce a relatively simple and efficient optical technique to measure nanoscale displacement based on visibility variations of the Fresnel diffraction fringes from a two-dimensional phase step. In this paper we use our technique to measure electromechanical expansions by a thin piezoelectric ceramic and also thermal changes in the diameter of a tungsten wire. Early results provide convincing evidence that sensitivity up to a few nanometers can be achieved, and our technique has the potential to be used as a nanodisplacement probe.