Hazard identification of powder generated from a chemical vapor deposition process in the semiconductor manufacturing industry

J Occup Environ Hyg. 2013;10(1):D1-5. doi: 10.1080/15459624.2012.734274.
No abstract available

MeSH terms

  • Air Pollutants, Occupational / analysis*
  • Air Pollutants, Occupational / chemistry*
  • Hazardous Substances / analysis*
  • Humans
  • Powders / chemistry
  • Powders / isolation & purification
  • Republic of Korea
  • Semiconductors*

Substances

  • Air Pollutants, Occupational
  • Hazardous Substances
  • Powders