Graphene bandgap induced by ferroelectric HfO2 doped with Zr (HfZrO)

Nanotechnology. 2020 Apr 17;31(27):275202. doi: 10.1088/1361-6528/ab814b. Epub 2020 Mar 19.

Abstract

Motivated by the need to open a bandgap in graphene, we show experimentally that the CMOS-compatible ferroelectric HfZrO substrate induces a bandgap of 0.18 eV in graphene monolayer, which allows top-gate graphene/HfZrO/SiO2/Si field-effect transistors to have high on/off current ratio, of about 103, at small drain voltages, of 0.5 V, and for gate voltage spans of only 3.5 V. In addition, these transistors have a very high transconductance, of about 1 mS, and carrier mobilities of 7900 cm2 Vs-1. The results show that this relatively simple and wafer-scale compatible bandgap opening method in graphene renders this material useful for digital low-power electronics.