Atomic layer deposition: an overview
Chem Rev
.
2010 Jan;110(1):111-31.
doi: 10.1021/cr900056b.
Author
Steven M George
1
Affiliation
1
Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309, USA. Steven.George@Colorado.Edu
PMID:
19947596
DOI:
10.1021/cr900056b
No abstract available